Microelectromechanical Systems Resonator
August 13, 2010
According to recent research from Japan, “A four-points-inner-pinned ring-shaped microelectromechanical systems (MEMS) resonator has been investigated. The simulated comparison between disk-and ring-shaped resonators indicates that the amplitudes of the ring-shaped resonators are more than ten times larger Tiffany 1837 Cuff links those of the disk-shaped ones for modes with the same resonant frequency.”
“Three types of anchor configuration for the ring-shaped resonators, inner-pinned, outer-pinned, and center-fixed, were compared. The results show that, for the inner-pinned ring-shaped resonator, three fundamental resonant modes occur close to each other, although this resonator is the smallest and does not suffer from the effect of misalignment as a result of one mask fabrication. A new method to identify each fundamental resonant mode has been proposed and successfully adapted for evaluating the frequency Square cuff links of fabricated resonators. The fabricated ring-shaped resonator had a radial-contour-common (RCC) resonant mode at 1.615MHz with a Q-factor of over 30,000,” wrote T. Oka and colleagues, Ritsumeikan University.
The researchers concluded: “These values agreed at 98.9% accuracy with those of the simulated resonator.”
Oka and colleagues published their study in Japanese Journal of Applied Physics (Tiffany Metropolis Cuff links of Four-Points-Pinned Ring-Shaped Silicon Microelectromechanical Systems Resonator. Japanese Journal of Applied Physics, 2010;49(6 Part 2 S):GN605).
For additional information, contact T. Oka, Ritsumeikan University, College Science & Frank Gehry Fish cuff links, 1-1-1 Noji Higashi, Shiga 5258577, Japan.
Publisher contact information for the Japanese Journal of Applied Physics is: Japan Society Applied Physics, Kudan-Kita Building 5TH Floor, 1-12-3 Kudan-Kita, Chiyoda-Ku, Tokyo, 102-0073, Japan.
This article was prepared by News of Science editors from staff and other reports.
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